Meller Group : Single Molecule Biophysics & Nano-biotechnologyTechnion Logo

Fabrication of solid-state nanopores and nanopore arrays

We use a high intensity electron beam of a field-emission Transmission Electron Microscope (TEM) for the fabrication of uniform nanopores and nanopore arrays in SiN membranes. These nanopores are used for single-molecule DNA analysis. Nanopores ranging between 1 - 20 nm can be fabricated (see Figure 1). Our nanopores exhibit a truncated double-cone structure, as revealed by 3D TEM tomography measurements (see Figure 2). The current versus voltage characteristics of the nanopore are highly symmetric and scale with pore size, when taking into account the truncated double-cone structure of the pores.

Nanopore arrays are fabricated using a Scanning TEM, with a typical size distribution smaller than 0.5 nm (STD), as shown in Figure 3. This process is substantially faster compared to other state of the art techniques. Our nanopores can be assembled in micro-fluidic cells to allow current measurements in a decreased noise setting. This method enables to readily probe dsDNA and ssDNA ranging between 50bp and 50kb.

Nanopore array







Figure 3


  1. Kim, M.-J., M. Wanunu, C.D. Bell and A. Meller. (2006) Rapid Fabrication of Uniform Size Nanopores and Nanopore Arrays for Parallel DNA Analysis. Adv. Mater. 18, 3149-53
  2. Kim, M.-J., McNally, B., Murata, K. & Meller, A. (2007) Characteristics of solid-state nanometre pores fabricated using a transmission electron microscope. Nanotechnology. 18, 205302.


Solid-state Nanopores

Figure 1

Figure 2